Systems and Components
Veeco Instruments
Ion Beam Etching, Deposition, and ALD Systems
Research and production systems for ion beam and ALD applications
RF and End Hall Ion Sources
Ion sources for cleaning, densification and etching of materials
Intlvac Thin Film
Thin Film Deposition and Etching Systems
Systems for PVD, ion beam etching, DLC and optical fiber metallization
Thin Film Coating Services
Range of Coating and Etching Services
Surface Science Integration
Atmospheric Rapid Thermal Processing Systems
Dual side heating with temperatures up to 1250 °C
Seren Industrial Power Systems
RF Generators and Matching Networks
Range of RF Generators from 125W to 40KW in range of frequencies